Detecting Digital Micromirror Device Malfunctions in High-throughput Maskless Lithography
نویسندگان
چکیده
منابع مشابه
On-Demand Data Pumping for Digital Micromirror Device in Maskless Lithography Systems
The maskless lithography technology requires the management and transmission of exposure data at very high data rates. To meet these requirements, there were techniques on lossless data compression and on high performance data transmission. Many applications using Digital Micro-mirror Device (DMD) require huge and reliable data transmission and high performance processing capabilities enough to...
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ژورنال
عنوان ژورنال: Journal of the Optical Society of Korea
سال: 2013
ISSN: 1226-4776
DOI: 10.3807/josk.2013.17.6.513